28. Juni 2026 bis 2. Juli 2026
Eurogress Aachen
Europe/Berlin Zeitzone

The Organizing Committee of ICNCE 2026

Development of ion-beam deposition and etching processes for 3D integration of phase-change memory materials in arrays

Nicht eingeplant
2h 30m
Europa Hall (Eurogress Aachen)

Europa Hall

Eurogress Aachen

Sprecher

Van Hao Vu () Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Otto-Blumenthal-Str. 6, 52074 Aachen)
Preferred contribution type (Poster only after deadline) Poster
Primary scientific area Materials and Device Physics & Engineering
Secondary scientific area Neuromorphic Circuits Systems and Architecture
Your career stage PhD student

Autor

Van Hao Vu () Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Otto-Blumenthal-Str. 6, 52074 Aachen)

Co-Autoren

Herr Alexander Kiehn (Institute of Physics (IA), RWTH Aachen University, Sommerfeldstraße 14, 52074 Aachen, Germany) Prof. Matthias Wuttig (Institute of Physics (IA), RWTH Aachen University, Sommerfeldstraße 14, 52074 Aachen, Germany) Prof. Sven Ingebrandt () Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Otto-Blumenthal-Str. 6, 52074 Aachen) Dr. Xuan Thang Vu () Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Otto-Blumenthal-Str. 6, 52074 Aachen)

Präsentationsmaterialien